Fundamental Principles of Optical Lithography: The Science of Microfabrication
Country | USA |
Brand | Springer |
Manufacturer | Springer |
Binding | Hardcover |
ItemPartNumber | 123 black & white illustrations, 5 black |
ReleaseDate | 2014-11-03 |
UnitCount | 1 |
EANs | 9783319102948 |